PV Solar - R&D Sputtering tool for thin film Photovoltaics
Power Vision has developed a flexible tool for thin film R&D for photovoltaics. The PV Solar is equipped with a vacuum load lock for fast process development. Applications of the system include process development for single layer films or multilayer stacks. Materials of interest include thin film transmitting conducting oxides, metal or alloy contacts, metal-oxides and nitrides, thin film CdTe and CIGS.
|The PV Express from PowerVision Ltd is a fast and
flexible tool for thin film process development
The deposition chamber has positions for four 6 inch circular magnetrons. One of these positions can be replaced with a plasma source for reactive sputtering or with a thermal evaporation source. Substrates are carried vertically on removable carousels. Different carousels can be exchanged depending on the type of substrates to be coated. The carousels have a maximum overall diameter of 200mm and height of ~100mm. The number of substrates that can be carried depends on their overall size and shape. For example, 6 round substrates of 85mm diameter x 5mm thick can be coated, or 4 square substrates 100x100mm.
The system is pumped using a two stage rotary pump and a turbomolecular pump is fitted to the deposition chamber. A Meissner trap may be fitted as an option to remove water vapour and to minimise pumping time to pre-process pressure. Additional vacuum ports and manifolds are supplied for process monitoring such as a baratron, RGA and optical monitoring. Substrate heating to 450C is provided.
The vacuum system and process steps (flow control, deposition sources) are fully computer controlled. A simple touchscreen interface can be provided for established processes, and extended control using an external keyboard and monitor is provided for development purposes.
For further detail please contact Power Vision.